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Items for Subject "x-ray collimators x-ray grids thick films high aspect ratio structures MEMS electroplating LIGA x-ray lithography deep etch x-ray lithography"

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Issue DateTitleAuthor(s)
1995 Fabricating Sub-collimating Grids for an X-ray Solar Imaging Spectrometer using LIGA Techniques Brennan, R.; Hecht, M.; Wiberg, D.; Manion, S.; Bonivert, W.; Hruby, J.; Scholz, M.; Stowe, T.; Kenny, T.; Jackson, K.; Malek, C.

 

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