NASA Jet Propulsion Laboratory California Institute of Technology Follow this link to skip to the main content

BEACON eSpace at Jet Propulsion Laboratory >

Items for Subject "x-ray collimators x-ray grids thick films High aspect ration structures integrated processes xenon difluoride silicon etch MEMS electroplating"

Return to Browse by Subject
Sorting by Title Sort by Date

Showing 1 items.

Issue DateTitleAuthor(s)
1995 Fine Pitch Grids for an X-Ray Solar Imaging Spectrometer Fabricated by Optical Lithography and XeF2 Etching Brennen, R.; Hecht, M.; Wiberg, D.; Manion, S.; Bonivert, W.; Hruby, J.; Pister, K.; Kruglick, E.

 

Privacy/Copyright Image Policy Beacon Home Contact Us
NASA Home Page + Div 27
+ JPL Space
Site last updated on December 5, 2014.
If you have any comments or suggestions for this web site, please e-mail Robert Powers.