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Items for Subject "x-ray collimators x-ray grids thick films High aspect ration structures integrated processes xenon difluoride silicon etch MEMS electroplating"

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Issue DateTitleAuthor(s)
1995 Fine Pitch Grids for an X-Ray Solar Imaging Spectrometer Fabricated by Optical Lithography and XeF2 Etching Brennen, R.; Hecht, M.; Wiberg, D.; Manion, S.; Bonivert, W.; Hruby, J.; Pister, K.; Kruglick, E.


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