NASA Jet Propulsion Laboratory California Institute of Technology Follow this link to skip to the main content

BEACON eSpace at Jet Propulsion Laboratory >

Items for Subject "X-rays lithography on non-planar surfaces conformal coating large depth-of-field nanolithography"

Return to Browse by Subject
Sort by Title Sorting by Date

Showing 1 items.

Issue DateTitleAuthor(s)
29-Oct-1999 Nanometer X-ray Lithography Hartley, F.; Malek, C.

 

Privacy/Copyright Image Policy Beacon Home Contact Us
NASA Home Page + Div 27
+ JPL Space
Site last updated on November 15, 2012.
If you have any comments or suggestions for this web site, please e-mail Alexander Smith or call 4-4202.