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Title: Design and fabrication of a large vertical travel silicon inchworm microactuator for advanced segmented silicon space telescope (ASSIST)
Authors: Yang, E.
Dekany, R.
Padin, S.
Issue Date: Jan-2003
Citation: SPIE Photonics West, Micromachining and Microfabrication Conference
San Jose, CA, USA
Abstract: The goal of this research is to develop inchworm motor systems capable of simultaneously providing nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space.
Appears in Collections:JPL TRS 1992+

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