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|Title: ||Development of electroplated magnetic materials for MEMS|
|Authors: ||Myung, N. V.|
Sumadjo, P. T. A.
Park, D. Y.
|Issue Date: ||20-Oct-2002 |
|Citation: ||202nd Electrochemical Society Fall Meeting|
Salt Lake City, UT, USA
|Abstract: ||Soft ferromagnetic materials have thus far found the most utility in magnetic-MEMS, because the technologies necessary for depositing and micromachining them have been well developed previously by the data storage industry.|
|Appears in Collections:||JPL TRS 1992+|
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