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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/6362
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| Title: | Development of electroplated magnetic materials for MEMS |
| Authors: | Myung, N. V.
Sumadjo, P. T. A.
Park, D. Y. |
| Issue Date: | 20-Oct-2002 |
| Citation: | 202nd Electrochemical Society Fall Meeting
Salt Lake City, UT, USA |
| Abstract: | Soft ferromagnetic materials have thus far found the most utility in magnetic-MEMS, because the technologies necessary for depositing and micromachining them have been well developed previously by the data storage industry. |
| URI: | http://hdl.handle.net/2014/6362 |
| Appears in Collections: | JPL TRS 1992+
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