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Title: Development of electroplated magnetic materials for MEMS
Authors: Myung, N. V.
Sumadjo, P. T. A.
Park, D. Y.
Issue Date: 20-Oct-2002
Citation: 202nd Electrochemical Society Fall Meeting
Salt Lake City, UT, USA
Abstract: Soft ferromagnetic materials have thus far found the most utility in magnetic-MEMS, because the technologies necessary for depositing and micromachining them have been well developed previously by the data storage industry.
Appears in Collections:JPL TRS 1992+

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