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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/42933
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| Title: | Development of cryogenic detector arrays using ALD |
| Authors: | LeDuc, Rick
Greer, Frank
Day, Peter |
| Keywords: | detectir
arrays
superconductors
Atomic Layer Deposition |
| Issue Date: | 11-Dec-2012 |
| Publisher: | Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012. |
| Citation: | NASA Long-Wavelength SR&T Workshop, Washington, D. C. , December 11, 2012 |
| URI: | http://hdl.handle.net/2014/42933 |
| Appears in Collections: | JPL TRS 1992+
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