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Title: Curvature control of silicon microlens for THz dielectric antenna
Authors: Lee, Choonsup
Chattopadhyay, Goutam
Cooper, Ken
Mehdi, Imran
Keywords: silicon microlens
silicon antenna technology
Issue Date: 23-Sep-2012
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.
Citation: 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz). Wollongong, Australia, September 23-28 , 2012
Abstract: We have controlled the curvature of silicon microlens by changing the amount of photoresist in order to microfabricate hemispherical silicon microlens which can improve the directivity and reduce substrate mode losses.
Appears in Collections:JPL TRS 1992+

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