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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/42311
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| Title: | Curvature control of silicon microlens for THz dielectric antenna |
| Authors: | Lee, Choonsup
Chattopadhyay, Goutam
Cooper, Ken
Mehdi, Imran |
| Keywords: | silicon microlens
silicon antenna technology |
| Issue Date: | 23-Sep-2012 |
| Publisher: | Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012. |
| Citation: | 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz). Wollongong, Australia, September 23-28 , 2012 |
| Abstract: | We have controlled the curvature of silicon microlens by changing the amount of photoresist in order to microfabricate hemispherical silicon microlens which can improve the directivity and reduce substrate mode losses. |
| URI: | http://hdl.handle.net/2014/42311 |
| Appears in Collections: | JPL TRS 1992+
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