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Title: Atomically precise surface and interface engineering via atomic layer deposition to enable high‐performance materials, detectors, and instruments
Authors: F. Greer
Hoenk, M. E.
Jones, T.J.
Jacquot, B. C.
Dickie, M.
Monacos, S.
Nikzad, S.
Day, P.
Leduc, R.
Hamden, E.
Schiminovich, D.
Beasley, M.
Gantner, B.
Morrissey, Patrick
Martin, Christopher
Keywords: Anti‐reflective coatings
Optical elements (filters)
Superconducting detectors
Surface treatments
Issue Date: 2011
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2011.
Appears in Collections:JPL TRS 1992+

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