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Title: A piezoelectric unimorph deformable mirror concept by wafer transfer for ultra large space telescopes
Authors: Yang, Eui-Hyeok
Shcheglov, Kirill
Keywords: Deformable mirror (DM)
microelectromechanical Systems (MEMS)
adaptive optics
Piezoelectric actuator
unimorph actuation
continuous mirror
wafer-level membrane transfer
Issue Date: 22-Aug-2002
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2002.
Citation: SPIE International Symposium on Astronomical Telescopes and Instrumentation, Waikoloa, Hawaii, August 22-28, 2002.
Abstract: Future concepts of ultra large space telescopes include segmented silicon mirrors and inflatable polymer mirrors. Primary mirrors for these systems cannot meet optical surface figure requirements and are likely to generate over several microns of wavefront errors. In order to correct for these large wavefront errors, high stroke optical quality deformable mirrors are required. JPL has recently developed a new technology for transferring an entire wafer-level mirror membrane from one substrate to another. A thin membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers. The measured peak-to-valley surface error of a transferred and patterned membrane (1 mm x 1 mm x 0.016 mm) is only 9 nm. The mirror element actuation principle is based on a piezoelectric unimorph. A voltage applied to the piezoelectric layer induces stress in the longitudinal direction causing the film to deform and pull on the mirror connected to it. The advantage of this approach is that the small longitudinal strains obtainable from a piezoelectric material at modest voltages are thus translated into large vertical displacements. Modeling is performed for a unimorph membrane consisting of clamped rectangular membrane with a PZT layer with variable dimensions. The membrane transfer technology is combined with the piezoelectric bimorph actuator concept to constitute a compact deformable mirror device with a large stroke actuation of a continuous mirror membrane, resulting in a compact A0 systems for use in ultra large space telescopes.
Appears in Collections:JPL TRS 1992+

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