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Title: Low power, wide dynamic range carbon nanotube vacuum gauges
Authors: Kaul, Anupama B.
Manohara, Harish M.
Keywords: vacuum gauges
carbon nanotubes
pressure sensors
microelectromechanical systems (MEMS)
Dektak profilometer
JEOL E-beam aligner
E-beam evaporator
Issue Date: 16-Jan-2008
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2008.
Citation: IEEE MEMS Conference 2008, Tucson, AZ, January 16, 2008
Appears in Collections:JPL TRS 1992+

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