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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/41527
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| Title: | Low power, wide dynamic range carbon nanotube vacuum gauges |
| Authors: | Kaul, Anupama B.
Manohara, Harish M. |
| Keywords: | vacuum gauges
carbon nanotubes
pressure sensors
microelectromechanical systems (MEMS)
Dektak profilometer
JEOL E-beam aligner
E-beam evaporator |
| Issue Date: | 16-Jan-2008 |
| Publisher: | Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2008. |
| Citation: | IEEE MEMS Conference 2008, Tucson, AZ, January 16, 2008 |
| URI: | http://hdl.handle.net/2014/41527 |
| Appears in Collections: | JPL TRS 1992+
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