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Title: Silicon nanotips antireflection surface for micro sun sensor
Authors: Bae, Sam Y.
Lee, Choonsup
Mobasser, Sohrab
Manohara, Harish
Keywords: antireflection
Micro Sun Sensor (MSS)
Issue Date: 17-Jul-2006
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2006.
Citation: IEEE Nano Conference, Cincinnati, Ohio, July 17-20, 2006.
Abstract: We have developed a new technique to fabricate antireflection surface using silicon nano-tips for use on a micro sun sensor for Mars rovers. We have achieved randomly distributed nano-tips of radius spanning from 20 nm to 100 nm and aspect ratio of ~200 using a two-step dry etching process. The 30° specular reflectance at the target wavelength of 1 μm is only about 0.09 %, nearly three orders of magnitude lower than that of bare silicon, and the hemispherical reflectance is ~ 8%. By changing the density and aspect ratio of these nanotips, the change in reflectance is demonstrated. Using surfaces covered with these nano-tips, the critical problem of ghost images that are caused by multiple internal reflections in a micro sun sensor was solved.
Appears in Collections:JPL TRS 1992+

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