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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/39312
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| Title: | A back-illuminated megapixel CMOS image sensor |
| Authors: | Pain, Bedabrata
Cunningham, Thomas
Nikzad, Shouleh
Hoenk, Michael
Jones, Todd
Wrigley, Chris
Hancock, Bruce |
| Keywords: | Complementary Metal Oxide Semiconductor imager (CMOS)
back - illumination |
| Issue Date: | 9-Jun-2005 |
| Publisher: | Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2005. |
| Citation: | IEEE Workshop on Charge-Coupled Devices and Advanced Image Sensors, Karuizawa, Japan, June 9-11, 2005. |
| Abstract: | In this paper, we present the test and characterization results for a back-illuminated megapixel CMOS imager. The imager pixel consists of a standard junction photodiode coupled to a three transistor-per-pixel switched source-follower readout [1]. The imager also consists of integrated timing and control and bias generation circuits, and provides analog output. The analog column-scan circuits were implemented in such a way that the imager could be configured to run in off-chip correlated double-sampling (CDS) mode. The imager was originally designed for normal front-illuminated operation, and was fabricated in a commercially available 0.5 pn triple-metal CMOS-imager compatible process. For backside illumination, the imager was thinned by etching away the substrate was etched away in a post-fabrication processing step. |
| URI: | http://hdl.handle.net/2014/39312 |
| Appears in Collections: | JPL TRS 1992+
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