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Title: A back-illuminated megapixel CMOS image sensor
Authors: Pain, Bedabrata
Cunningham, Thomas
Nikzad, Shouleh
Hoenk, Michael
Jones, Todd
Wrigley, Chris
Hancock, Bruce
Keywords: Complementary Metal Oxide Semiconductor imager (CMOS)
back - illumination
Issue Date: 9-Jun-2005
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2005.
Citation: IEEE Workshop on Charge-Coupled Devices and Advanced Image Sensors, Karuizawa, Japan, June 9-11, 2005.
Abstract: In this paper, we present the test and characterization results for a back-illuminated megapixel CMOS imager. The imager pixel consists of a standard junction photodiode coupled to a three transistor-per-pixel switched source-follower readout [1]. The imager also consists of integrated timing and control and bias generation circuits, and provides analog output. The analog column-scan circuits were implemented in such a way that the imager could be configured to run in off-chip correlated double-sampling (CDS) mode. The imager was originally designed for normal front-illuminated operation, and was fabricated in a commercially available 0.5 pn triple-metal CMOS-imager compatible process. For backside illumination, the imager was thinned by etching away the substrate was etched away in a post-fabrication processing step.
Appears in Collections:JPL TRS 1992+

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