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Please use this identifier to cite or link to this item: http://hdl.handle.net/2014/38060

Title: GaN-based micro pressure sensor for extreme environments
Authors: Son, K.-A.
Liu, Y.
Ruden, P. P.
Xie, J.
Biyikli, N.
Moon, Y.-T.
Onojima, N.
Morkoc, H.
Keywords: GaN
microsensor
pressure
extreme environment
Issue Date: Oct-2005
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2005.
Citation: IEEE Sensors 2005, Irvine, CA, October 31 - November 4, 2005
Abstract: The linearity and reversibility in pressure response suggest that these newly investigated n-GaN/AlxGa(1-x)N/n-GaN devices are promising candidates for high-pressure sensor applications.
URI: http://hdl.handle.net/2014/38060
Appears in Collections:JPL TRS 1992+

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