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Title: A Miniature High-Sensitivity Broadband Accelerometer Based on Electron Tunneling Transducers
Authors: Rockstad, H.
Kenny, T.
Reynolds, J.
Kaiser, W.
Gabrielson, T.
Issue Date: 7-Jun-1993
Citation: Yokohama, Japan
Abstract: This paper describes the design of miniature accelerometers and new high-sensitivity microsensors developed using high-resolution position sensors based on electron tunneling.
Appears in Collections:JPL TRS 1992+

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