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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/35666
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| Title: | Measurement and Modeling of Size and Proximity Effects in Conductor Linewidths |
| Authors: | Lieneweg, U.
Zamani, N. |
| Issue Date: | Mar-1994 |
| Citation: | San Diego, California, USA |
| Abstract: | The widths of refractory-gate metal lines were measured as a function of design width W<sub>i</sub> and design spacing S<sub>j</sub> using an electrical test structure, the Cross-Quad-Bridge. |
| URI: | http://hdl.handle.net/2014/35666 |
| Appears in Collections: | JPL TRS 1992+
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