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Title: Measurement and Modeling of Size and Proximity Effects in Conductor Linewidths
Authors: Lieneweg, U.
Zamani, N.
Issue Date: Mar-1994
Citation: San Diego, California, USA
Abstract: The widths of refractory-gate metal lines were measured as a function of design width W<sub>i</sub> and design spacing S<sub>j</sub> using an electrical test structure, the Cross-Quad-Bridge.
Appears in Collections:JPL TRS 1992+

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