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Title: Control of Micromachined Deformable Mirrors
Authors: Agronin, M. L.
Bartman, R.
Hadaegh, F. Y.
Kaiser, W.
Wang, P. K. C.
Issue Date: May-1992
Citation: Pasadena, CA
Abstract: A micromachined deformable mirror with pixelated electrostatic actuators is proposed. The paper begins with a physical description of the proposed mirror. Then, a mathematical model in the form of a nonlinear partial differential equation describing the mirror surface deformations is derived. This model is used to derive the required voltages for the actuators to achieve a specified static deformation of the mirror surface. This is followed by the derivation of a static nonlinear feedback controller for achieving noninteracting actuation. Then, the structure for a complete control system for wavefront correction is proposed. The paper concludes with a discussion of the physical implementation of the proposed control system.
Appears in Collections:JPL TRS 1992+

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