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|Title: ||Control of Micromachined Deformable Mirrors|
|Authors: ||Agronin, M. L.|
Hadaegh, F. Y.
Wang, P. K. C.
|Issue Date: ||May-1992 |
|Citation: ||Pasadena, CA|
|Abstract: ||A micromachined deformable mirror with pixelated electrostatic actuators is proposed. The paper begins with a physical description of the proposed mirror. Then, a mathematical model in the form of a nonlinear partial differential equation describing the mirror surface deformations is derived. This model is used to derive the required voltages for the actuators to achieve a specified static deformation of the mirror surface. This is followed by the derivation of a static nonlinear feedback controller for achieving noninteracting actuation. Then, the structure for a complete control system for wavefront correction is proposed. The paper concludes with a discussion of the physical implementation of the proposed control system.|
|Appears in Collections:||JPL TRS 1992+|
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