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Title: Fabrication and Characterization of a Micromachined Deformable Mirror for Adaptive Optics Applications
Authors: Miller, L.
Kaiser, W.
Kenny, T.
Issue Date: 12-Apr-1993
Citation: Orlando, Florida, USA
Abstract: This paper describes how a micromachined, electrostatically controlled, and capacitively sensed deformable membrane mirror would meet the needs for active and adaptive optical elements.
Appears in Collections:JPL TRS 1992+

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