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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/35158
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| Title: | Fabrication and Characterization of a Micromachined Deformable Mirror for Adaptive Optics Applications |
| Authors: | Miller, L.
Kaiser, W.
Kenny, T. |
| Issue Date: | 12-Apr-1993 |
| Citation: | Orlando, Florida, USA |
| Abstract: | This paper describes how a micromachined, electrostatically controlled, and capacitively sensed deformable membrane mirror would meet the needs for active and adaptive optical elements. |
| URI: | http://hdl.handle.net/2014/35158 |
| Appears in Collections: | JPL TRS 1992+
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