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Please use this identifier to cite or link to this item: http://hdl.handle.net/2014/35158

Title: Fabrication and Characterization of a Micromachined Deformable Mirror for Adaptive Optics Applications
Authors: Miller, L.
Kaiser, W.
Kenny, T.
Issue Date: 12-Apr-1993
Citation: Orlando, Florida, USA
Abstract: This paper describes how a micromachined, electrostatically controlled, and capacitively sensed deformable membrane mirror would meet the needs for active and adaptive optical elements.
URI: http://hdl.handle.net/2014/35158
Appears in Collections:JPL TRS 1992+

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