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Please use this identifier to cite or link to this item: http://hdl.handle.net/2014/35071

Title: A Miniature High-Sensitivity Braodband Accelerometer Based on Electron Tunneling Transducers
Authors: Rockstad, H.
Kenny, T.
Reynolds, J.
Kaiser, W.
Gabrielson, T.
Issue Date: 7-Jun-1993
Citation: Yokohama, Japan
Abstract: This paper describes the successful fabrication and demonstration of a new dual-element micromachined silicon tunnel accelerometer that extends the operational bandwidth beyond the resonant frequency of the proof mass.
URI: http://hdl.handle.net/2014/35071
Appears in Collections:JPL TRS 1992+

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