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Title: Fine Pitch Grids for an X-Ray Solar Imaging Spectrometer Fabricated by Optical Lithography and XeF2 Etching
Authors: Brennen, R.
Hecht, M.
Wiberg, D.
Manion, S.
Bonivert, W.
Hruby, J.
Pister, K.
Kruglick, E.
Issue Date: 1995
Citation: SPIE Micromaching and Microfabrication 95
Austin, TX
Abstract: Fine-pitch, sub-collimating X-ray grids have been developed for an instrument in the High Energy Solar Spectroscopic Imager , a proposed NASA mission. In addition to high-energy x- rays, the instrument requires collimation of photons with energies of less than 4 keV such that free-standing grids are required that have no material between the grid slats. Fabrication of these grids is described.
Appears in Collections:JPL TRS 1992+

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