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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/27778
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| Title: | A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft |
| Authors: | Tang, T. K.
Gutierrez, R. C.
Stell, C. B.
Vorperian, V.
Arakaki, G. A.
Rice, J. T.
Li, W. J.
Chakraborty, I.
Shceglov, K.
Wilcox, J. Z.
Kaiser, W. J. |
| Issue Date: | 26-Jan-1997 |
| Citation: | Hotel Nagoya Castle, Japan |
| Abstract: | In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested. |
| URI: | http://hdl.handle.net/2014/27778 |
| Appears in Collections: | JPL TRS 1992+
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