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|Title: ||A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft|
|Authors: ||Tang, T. K.|
Gutierrez, R. C.
Stell, C. B.
Arakaki, G. A.
Rice, J. T.
Li, W. J.
Wilcox, J. Z.
Kaiser, W. J.
|Issue Date: ||26-Jan-1997 |
|Citation: ||Hotel Nagoya Castle, Japan|
|Abstract: ||In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested.|
|Appears in Collections:||JPL TRS 1992+|
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