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Title: A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft
Authors: Tang, T. K.
Gutierrez, R. C.
Stell, C. B.
Vorperian, V.
Arakaki, G. A.
Rice, J. T.
Li, W. J.
Chakraborty, I.
Shceglov, K.
Wilcox, J. Z.
Kaiser, W. J.
Issue Date: 26-Jan-1997
Citation: Hotel Nagoya Castle, Japan
Abstract: In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested.
Appears in Collections:JPL TRS 1992+

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