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|Title: ||Silicon Bulk Micromachined Vibratory Gyroscope|
|Authors: ||Tang, T. K.|
Gutierrez, R. C.
Wilcox, J. Z.
Li, W. J.
Kaiser, W. J.
|Issue Date: ||2-Jun-1996 |
|Citation: ||Hilton Head, South Carolina, USA|
|Abstract: ||This paper reports on design, modeling, fabrication, and characterization of a novel silicon bulk micromachined vibratory rate gyroscope designed for microspacecraft applications. The new microgyroscope consists of a silicon four leaf cloverstructure with a post attached to the center.|
|Appears in Collections:||JPL TRS 1992+|
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