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Title: Silicon Bulk Micromachined Vibratory Gyroscope
Authors: Tang, T. K.
Gutierrez, R. C.
Wilcox, J. Z.
Stell, C.
Vorperian, V.
Calvet, R.
Li, W. J.
Charkaborty, I.
Bartman, R.
Kaiser, W. J.
Issue Date: 2-Jun-1996
Citation: Hilton Head, South Carolina, USA
Abstract: This paper reports on design, modeling, fabrication, and characterization of a novel silicon bulk micromachined vibratory rate gyroscope designed for microspacecraft applications. The new microgyroscope consists of a silicon four leaf cloverstructure with a post attached to the center.
Appears in Collections:JPL TRS 1992+

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