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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/26094
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| Title: | Silicon Bulk Micromachined Vibratory Gyroscope |
| Authors: | Tang, T. K.
Gutierrez, R. C.
Wilcox, J. Z.
Stell, C.
Vorperian, V.
Calvet, R.
Li, W. J.
Charkaborty, I.
Bartman, R.
Kaiser, W. J. |
| Issue Date: | 2-Jun-1996 |
| Citation: | Hilton Head, South Carolina, USA |
| Abstract: | This paper reports on design, modeling, fabrication, and characterization of a novel silicon bulk micromachined vibratory rate gyroscope designed for microspacecraft applications. The new microgyroscope consists of a silicon four leaf cloverstructure with a post attached to the center. |
| URI: | http://hdl.handle.net/2014/26094 |
| Appears in Collections: | JPL TRS 1992+
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