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Please use this identifier to cite or link to this item: http://hdl.handle.net/2014/22802

Title: Taguchi Optimization for the Processing of Epon SU-8 Resist
Authors: Eyre, B.
Blosiu, J.
Wiberg, D.
Issue Date: 25-Jan-1998
Citation: Heidelberg, Germany
URI: http://hdl.handle.net/2014/22802
Appears in Collections:JPL TRS 1992+

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