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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/22699
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| Title: | Taguchi Method Applied in Optimization of Shipley 5740 Positive Resist Deposition |
| Authors: | Hui, Allan
Wiberg, Dean V.
Blosiu, Julian |
| Issue Date: | 22-Feb-1997 |
| Citation: | Santa Clara, California, USA |
| Abstract: | Taguchi Methods of Robust Design Presents a way to optimize output process performance through organized experiments, by using orthogonal arrays for the evaluation of the process controlleable parameters. |
| URI: | http://hdl.handle.net/2014/22699 |
| Appears in Collections: | JPL TRS 1992+
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