BEACON eSpace at Jet Propulsion Laboratory >
JPL Technical Report Server >
JPL TRS 1992+ >
Please use this identifier to cite or link to this item:
|Title: ||Taguchi Method Applied in Optimization of Shipley 5740 Positive Resist Deposition|
|Authors: ||Hui, Allan|
Wiberg, Dean V.
|Issue Date: ||22-Feb-1997 |
|Citation: ||Santa Clara, California, USA|
|Abstract: ||Taguchi Methods of Robust Design Presents a way to optimize output process performance through organized experiments, by using orthogonal arrays for the evaluation of the process controlleable parameters.|
|Appears in Collections:||JPL TRS 1992+|
Items in DSpace are protected by copyright, but are furnished with U.S. government purpose use rights.