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Title: Taguchi Method Applied in Optimization of Shipley 5740 Positive Resist Deposition
Authors: Hui, Allan
Wiberg, Dean V.
Blosiu, Julian
Issue Date: 22-Feb-1997
Citation: Santa Clara, California, USA
Abstract: Taguchi Methods of Robust Design Presents a way to optimize output process performance through organized experiments, by using orthogonal arrays for the evaluation of the process controlleable parameters.
Appears in Collections:JPL TRS 1992+

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