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Title: A LIGA Fabricated Quadrupole Array for Mass Spectroscopy
Authors: Jackson, K.
Wiberg, D. V.
Hecht, M. H.
Orient, O. J.
Chutjian, A.
Yee, K.
Fuerstenau, S.
Brennen, R. A.
Hruby, J.
Bonivert, W.
Issue Date: 20-Jun-1997
Citation: Madison, Wisconsin, USA
Abstract: A linear array of nine quadrupoles was fabricated using the LIGA process. Pole heights ranging from 1 to 3 mm were fabricated using synchrotron X-ray exposures to form free standing polymethylmethacrylate (PMMA) molds into which copper, gold or nickel were electroplated.
Appears in Collections:JPL TRS 1992+

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