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Title: Deep Reactive-Ion Etched Micro Valves for Spacecraft Propulsion
Authors: Tang, W.
Chakraborty, I.
Pyle, D.
Issue Date: 1-Nov-1998
Citation: MTG: "NanoSpace 98" International Conference on Intergrated Nano/Microtechnology for Space Appl.
Houston, TX, U.S.A.
Abstract: We report on the design, and test setup of a silicon diaphragm micro valve.
Appears in Collections:JPL TRS 1992+

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