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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/20661
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| Title: | Deep Reactive-Ion Etched Micro Valves for Spacecraft Propulsion |
| Authors: | Tang, W.
Chakraborty, I.
Pyle, D. |
| Issue Date: | 1-Nov-1998 |
| Citation: | MTG: "NanoSpace 98" International Conference on Intergrated Nano/Microtechnology for Space Appl.
Houston, TX, U.S.A. |
| Abstract: | We report on the design, and test setup of a silicon diaphragm micro valve. |
| URI: | http://hdl.handle.net/2014/20661 |
| Appears in Collections: | JPL TRS 1992+
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