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Title: Thick Film UV Lithography Fabrication of Large Area, Fine Pitch Collimating Grids for X-Ray Astronomy
Authors: Wiberg, D.
White, V.
Shcheglov, K.
Bonivert, W.
Hruby, J.
van Beek, F.
Dennis, B.
Hurford, G.
Lang, F.
Jackson, K.
Issue Date: 30-Mar-1999
Citation: MTG: Microelectromechanicals Systems
Paris, France
Appears in Collections:JPL TRS 1992+

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