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|Title: ||Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures|
|Authors: ||Gutierrez, R. C.|
Shcheglov, K. V.
Tang, T. K.
|Issue Date: ||7-Jun-1998 |
|Citation: ||Solid State Sensor and Actuator Workshop|
Hilton Head Island, South Carolina, USA
|Abstract: ||We present a new microscopy tool for quantitative measurement of the resonant motion of microstructures. The new instrument uses optical interferometry to generate a three dimentional surface topographic map of a vibrating micormachined resonator in vacuum.|
|Appears in Collections:||JPL TRS 1992+|
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