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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/19426
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| Title: | Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures |
| Authors: | Gutierrez, R. C.
Shcheglov, K. V.
Tang, T. K. |
| Issue Date: | 7-Jun-1998 |
| Citation: | Solid State Sensor and Actuator Workshop
Hilton Head Island, South Carolina, USA |
| Abstract: | We present a new microscopy tool for quantitative measurement of the resonant motion of microstructures. The new instrument uses optical interferometry to generate a three dimentional surface topographic map of a vibrating micormachined resonator in vacuum. |
| URI: | http://hdl.handle.net/2014/19426 |
| Appears in Collections: | JPL TRS 1992+
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