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Title: Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures
Authors: Gutierrez, R. C.
Shcheglov, K. V.
Tang, T. K.
Issue Date: 7-Jun-1998
Citation: Solid State Sensor and Actuator Workshop
Hilton Head Island, South Carolina, USA
Abstract: We present a new microscopy tool for quantitative measurement of the resonant motion of microstructures. The new instrument uses optical interferometry to generate a three dimentional surface topographic map of a vibrating micormachined resonator in vacuum.
Appears in Collections:JPL TRS 1992+

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