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Title: Stitching Error Reduction in Electron Beam Written Gratings
Authors: Dougherty, D.
Muller, R.
Maker, P.
Mansour, K.
Chacon, R.
Qiu, Y.
Young, M.
Forouhar, S.
Issue Date: May-2000
Citation: Conference on Lasers and Electro-Optics
Abstract: A multiple-write electron beam lithography techniques is described as linear filter on the grating spatial frequency spectrum.
Appears in Collections:JPL TRS 1992+

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