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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/18847
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| Title: | Stitching Error Reduction in Electron Beam Written Gratings |
| Authors: | Dougherty, D.
Muller, R.
Maker, P.
Mansour, K.
Chacon, R.
Qiu, Y.
Young, M.
Forouhar, S. |
| Issue Date: | May-2000 |
| Citation: | Conference on Lasers and Electro-Optics
USA |
| Abstract: | A multiple-write electron beam lithography techniques is described as linear filter on the grating spatial frequency spectrum. |
| URI: | http://hdl.handle.net/2014/18847 |
| Appears in Collections: | JPL TRS 1992+
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