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Please use this identifier to cite or link to this item: http://hdl.handle.net/2014/17639

Title: Microwave Induced Direct Bonding of Single Crystal Silicon Wafers
Authors: Budraa, N.
Jackson, H.
Barmatz, M.
Issue Date: 17-Sep-1999
Citation: 7th International Conference on Microwave and HF Heating
Spain
URI: http://hdl.handle.net/2014/17639
Appears in Collections:JPL TRS 1992+

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