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Title: Feasibility Study of MEMS-Based Accelerator Grid Systems for Micro-Ion Engines: Electric Breakdown Characteristics
Authors: Mueller, J.
Pyle, D.
Chakraborty, I.
Ruiz, R.
Tang, W.
Lawton, R.
Issue Date: 1999
Citation: AIAA Journal of Propulsion and Power
Abstract: Low-temperature (LTO) chemical vapor deposited (CVD) silicon dioxide was investigated for use as an insulator material in microfabricated ion engine accelerator grids.
Appears in Collections:JPL TRS 1992+

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