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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/16808
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| Title: | Fabrication and Characterization of Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device |
| Authors: | Ramesham, R.
Olivas, J.
Stokes, S.
Wilson, W.
Generazio, E. |
| Issue Date: | Jan-1999 |
| Citation: | Thin Solid Films
USA |
| Abstract: | This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited multilayer giant magnetoresistive (GMR) sensor. The device consists of a micromachined microstructure (membrane), GMR sensor, and a sputtered hard magnetic thin film element on to microstructure. |
| URI: | http://hdl.handle.net/2014/16808 |
| Appears in Collections: | JPL TRS 1992+
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