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Title: Fabrication and Characterization of Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device
Authors: Ramesham, R.
Olivas, J.
Stokes, S.
Wilson, W.
Generazio, E.
Issue Date: Jan-1999
Citation: Thin Solid Films
Abstract: This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited multilayer giant magnetoresistive (GMR) sensor. The device consists of a micromachined microstructure (membrane), GMR sensor, and a sputtered hard magnetic thin film element on to microstructure.
Appears in Collections:JPL TRS 1992+

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