NASA Jet Propulsion Laboratory California Institute of Technology Follow this link to skip to the main content

BEACON eSpace at Jet Propulsion Laboratory >
JPL Technical Report Server >
JPL TRS 1992+ >

Please use this identifier to cite or link to this item: http://hdl.handle.net/2014/16808

Title: Fabrication and Characterization of Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device
Authors: Ramesham, R.
Olivas, J.
Stokes, S.
Wilson, W.
Generazio, E.
Issue Date: Jan-1999
Citation: Thin Solid Films
USA
Abstract: This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited multilayer giant magnetoresistive (GMR) sensor. The device consists of a micromachined microstructure (membrane), GMR sensor, and a sputtered hard magnetic thin film element on to microstructure.
URI: http://hdl.handle.net/2014/16808
Appears in Collections:JPL TRS 1992+

Files in This Item:

File SizeFormat
99-0212.pdf2.08 MBAdobe PDFView/Open

Items in DSpace are protected by copyright, but are furnished with U.S. government purpose use rights.

 

Privacy/Copyright Image Policy Beacon Home Contact Us
NASA Home Page + Div 27
+ JPL Space
Site last updated on December 5, 2014.
If you have any comments or suggestions for this web site, please e-mail Robert Powers.