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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/16484
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| Title: | Fabrication of micro actuators for a MEMS deformable mirror by membrane transfer |
| Authors: | Yang, E. H.
Wiberg, D. V.
Dekany, R. G. |
| Issue Date: | 10-Jun-2001 |
| Citation: | Transducers '01 Conference
Munich, Germany |
| URI: | http://hdl.handle.net/2014/16484 |
| Appears in Collections: | JPL TRS 1992+
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