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|Title: ||Fabrication of micro actuators for a MEMS deformable mirror by membrane transfer|
|Authors: ||Yang, E. H.|
Wiberg, D. V.
Dekany, R. G.
|Issue Date: ||10-Jun-2001 |
|Citation: ||Transducers '01 Conference|
|Appears in Collections:||JPL TRS 1992+|
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