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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/15743
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| Title: | Heat transfer implications in the first MEMS fabricated thermal transiration-driven vacuum pump for gases |
| Authors: | Vargo, S. E.
Green, A. A.
Muntz, E. P. |
| Issue Date: | 5-Nov-2000 |
| Citation: | Fundamentals of Heat Transfer in Microdevices and Microsystems
Orlando, FL, USA |
| Abstract: | The success of NASA's future space missions and the development of portable, commercial instrument packages will depend greatly on miniaturized components enabled by the use of microelectromechanical systems (MEMS). |
| URI: | http://hdl.handle.net/2014/15743 |
| Appears in Collections: | JPL TRS 1992+
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