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Please use this identifier to cite or link to this item: http://hdl.handle.net/2014/15743

Title: Heat transfer implications in the first MEMS fabricated thermal transiration-driven vacuum pump for gases
Authors: Vargo, S. E.
Green, A. A.
Muntz, E. P.
Issue Date: 5-Nov-2000
Citation: Fundamentals of Heat Transfer in Microdevices and Microsystems
Orlando, FL, USA
Abstract: The success of NASA's future space missions and the development of portable, commercial instrument packages will depend greatly on miniaturized components enabled by the use of microelectromechanical systems (MEMS).
URI: http://hdl.handle.net/2014/15743
Appears in Collections:JPL TRS 1992+

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