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Title: Heat transfer implications in the first MEMS fabricated thermal transiration-driven vacuum pump for gases
Authors: Vargo, S. E.
Green, A. A.
Muntz, E. P.
Issue Date: 5-Nov-2000
Citation: Fundamentals of Heat Transfer in Microdevices and Microsystems
Orlando, FL, USA
Abstract: The success of NASA's future space missions and the development of portable, commercial instrument packages will depend greatly on miniaturized components enabled by the use of microelectromechanical systems (MEMS).
Appears in Collections:JPL TRS 1992+

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