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Title: Fabrication of Laterally Coupled Distributed Feedback Laser Structures by Two Step RIE in InGaAsSb-AlGaAsSb Material System Grown by MBE
Authors: Sin, Y.
Bicknell-Tassius, R.
Muller, R.
Forouhar, S.
Issue Date: 2000
Citation: Journal of Electronic Materials
Abstract: Data is presented on the fabrication of first order gratings in GaSb and AlGaAsSc layers by chlorine-based reactive ion etching (RIE).
Appears in Collections:JPL TRS 1992+

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