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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/15679
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| Title: | Fabrication of Laterally Coupled Distributed Feedback Laser Structures by Two Step RIE in InGaAsSb-AlGaAsSb Material System Grown by MBE |
| Authors: | Sin, Y.
Bicknell-Tassius, R.
Muller, R.
Forouhar, S. |
| Issue Date: | 2000 |
| Citation: | Journal of Electronic Materials
USA |
| Abstract: | Data is presented on the fabrication of first order gratings in GaSb and AlGaAsSc layers by chlorine-based reactive ion etching (RIE). |
| URI: | http://hdl.handle.net/2014/15679 |
| Appears in Collections: | JPL TRS 1992+
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