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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/13422
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| Title: | Fabrication of Novel Si3N4 micromesh spider web bolometer using deep trench etching on SOI wafer |
| Authors: | Yun, M.
Turner, A. D.
Bock, J. J.
Podosek, J. A. |
| Issue Date: | 28-Oct-2001 |
| Citation: | AVS 48th International Symposium
San Francisco, CA, USA |
| Abstract: | In this study, we fabricated and developed extremely sensitive Si***sub3***N***sub4*** micromesh spider web bolometers for sub-millimeter astrophysics using microelectromechanical system (MEMS) techniques. |
| URI: | http://hdl.handle.net/2014/13422 |
| Appears in Collections: | JPL TRS 1992+
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