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Title: Fabrication of Novel Si3N4 micromesh spider web bolometer using deep trench etching on SOI wafer
Authors: Yun, M.
Turner, A. D.
Bock, J. J.
Podosek, J. A.
Issue Date: 28-Oct-2001
Citation: AVS 48th International Symposium
San Francisco, CA, USA
Abstract: In this study, we fabricated and developed extremely sensitive Si***sub3***N***sub4*** micromesh spider web bolometers for sub-millimeter astrophysics using microelectromechanical system (MEMS) techniques.
Appears in Collections:JPL TRS 1992+

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