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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/12656
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| Title: | A wafer transfer technology for MEMS adaptive optics |
| Authors: | Yang, E. H.
Wiberg, D. V. |
| Issue Date: | 16-Nov-2001 |
| Citation: | ASME MEMS Symposia/2001 International Mechanical Engineering Congress and Exposition
New York, USA |
| URI: | http://hdl.handle.net/2014/12656 |
| Appears in Collections: | JPL TRS 1992+
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