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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/12645
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| Title: | A novel fabrication of Si***sub3***N***sub4*** micromesh spider web bolometer (MSWB) using deep trench etching on SOI wafer |
| Authors: | Yun, M.
Turner, A. D.
Bock, J. J. |
| Issue Date: | 29-Oct-2001 |
| Citation: | AVS 48th International Symposium
San Francisco, California, USA |
| URI: | http://hdl.handle.net/2014/12645 |
| Appears in Collections: | JPL TRS 1992+
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