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Title: A novel fabrication of Si***sub3***N***sub4*** micromesh spider web bolometer (MSWB) using deep trench etching on SOI wafer
Authors: Yun, M.
Turner, A. D.
Bock, J. J.
Issue Date: 29-Oct-2001
Citation: AVS 48th International Symposium
San Francisco, California, USA
Appears in Collections:JPL TRS 1992+

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