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Please use this identifier to cite or link to this item: http://hdl.handle.net/2014/12645

Title: A novel fabrication of Si***sub3***N***sub4*** micromesh spider web bolometer (MSWB) using deep trench etching on SOI wafer
Authors: Yun, M.
Turner, A. D.
Bock, J. J.
Issue Date: 29-Oct-2001
Citation: AVS 48th International Symposium
San Francisco, California, USA
URI: http://hdl.handle.net/2014/12645
Appears in Collections:JPL TRS 1992+

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