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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/11225
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| Title: | Design and fabrication of a large vertical travel silicon inchworm microactuator for advanced segmented silicon space telescope |
| Authors: | Yang, E.
Dekany, R.
Padin, S. |
| Issue Date: | Jan-2003 |
| Citation: | SPIE Photonics West, Micromachining and Microfabrication Conference
San Jose, CA, USA |
| Abstract: | This paper describes a proof-of-concept inchworm actuator designed to provide nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space. |
| URI: | http://hdl.handle.net/2014/11225 |
| Appears in Collections: | JPL TRS 1992+
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