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Title: Design and fabrication of a large vertical travel silicon inchworm microactuator for advanced segmented silicon space telescope
Authors: Yang, E.
Dekany, R.
Padin, S.
Issue Date: Jan-2003
Citation: SPIE Photonics West, Micromachining and Microfabrication Conference
San Jose, CA, USA
Abstract: This paper describes a proof-of-concept inchworm actuator designed to provide nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space.
Appears in Collections:JPL TRS 1992+

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