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Title: MEMS: fabrication of bolometric detectors for the Planck
Authors: Yun, M.
Bock, J.
Holmes, W.
Koch, T.
Lange, A.
Issue Date: 4-Nov-2002
Citation: Journal of Vacuum Science Technology: AVS 49th International Symposium
Denver, CO, USA
Abstract: We describe the fabrication process used to meet the stringent mission requirements on sensitivity, speed of response and stability.
Appears in Collections:JPL TRS 1992+

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