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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2014/10622
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| Title: | MEMS: fabrication of bolometric detectors for the Planck |
| Authors: | Yun, M.
Bock, J.
Holmes, W.
Koch, T.
Lange, A. |
| Issue Date: | 4-Nov-2002 |
| Citation: | Journal of Vacuum Science Technology: AVS 49th International Symposium
Denver, CO, USA |
| Abstract: | We describe the fabrication process used to meet the stringent mission requirements on sensitivity, speed of response and stability. |
| URI: | http://hdl.handle.net/2014/10622 |
| Appears in Collections: | JPL TRS 1992+
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